摘要 |
<p>Spectrometers including integrated capacitive detectors are described. An integrated capacitive detector integrates ion current from the collector (220) into a changing voltage. The detector includes a collector configured to receive ions in the spectrometer, a dielectric (228), and a plate (232) arranged in an overlapping configuration with collector on an opposite side of the dielectric. The detector also includes an amplifier (226).</p> |