| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card for a solid state imaging device, which allows for more accurate inspection of a solid state imaging device; and an inspection method of a solid state imaging device using the same.SOLUTION: The probe card for a solid state imaging device includes a probe which comes in contact with an electrode of a solid state imaging device to be inspected during inspection, an opening or a transparent member which allows the solid state imaging device to be exposed to inspection light emitted from a light source, and a plurality of partition plates arranged in parallel with each other between the light source and the solid state imaging device. The inspection method of a solid state imaging device uses the probe card. |
