发明名称 Vertical Power MOSFET and Methods of Forming the Same
摘要 A device includes a semiconductor layer of a first conductivity type, and a first and a second body region over the semiconductor layer, wherein the first and the second body regions are of a second conductivity type opposite the first conductivity type. A doped semiconductor region of the first conductivity type is disposed between and contacting the first and the second body regions. A gate dielectric layer is disposed over the first and the second body regions and the doped semiconductor region. A first and a second gate electrode are disposed over the gate dielectric layer, and overlapping the first and the second body regions, respectively. The first and the second gate electrodes are physically separated from each other by a space, and are electrically interconnected. The space between the first and the second gate electrodes overlaps the doped semiconductor region.
申请公布号 US2013320430(A1) 申请公布日期 2013.12.05
申请号 US201213486633 申请日期 2012.06.01
申请人 NG CHUN-WAI;CHOU HSUEH-LIANG;LIU RUEY-HSIN;SU PO-CHIH;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 NG CHUN-WAI;CHOU HSUEH-LIANG;LIU RUEY-HSIN;SU PO-CHIH
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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