发明名称 POLISHING COMPOSITION
摘要 Provided is a polishing composition for use in the polishing of an object to be polished that comprises a phase-change alloy. The polishing composition is characterized by comprising a brittle film-forming agent that is at least one compound selected from among compounds containing an abrasive grit, saturated monocarboxylic acid, and an organic phosphorus compound.
申请公布号 WO2013179718(A1) 申请公布日期 2013.12.05
申请号 WO2013JP56744 申请日期 2013.03.12
申请人 FUJIMI INCORPORATED 发明人 YOSHIZAKI, YUKINOBU;IZAWA, YOSHIHIRO
分类号 H01L21/304;B24B37/00 主分类号 H01L21/304
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