发明名称 MOISTURE BARRIER COATINGS
摘要 A moisture barrier coating for protecting a substrate from moisture, comprises an inorganic layer disposed over the substrate, the inorganic layer comprising an oxide or nitride of an element selected from the group consisting of silicon, aluminum, titanium, zirconium, hafnium and combinations thereof; and an organic silicon-containing layer disposed over the inorganic layer.
申请公布号 US2013320509(A1) 申请公布日期 2013.12.05
申请号 US201313959593 申请日期 2013.08.05
申请人 APPLIED MICROSTRUCTURES, INC. 发明人 KOBRIN BORIS;DANGARIA NIKUNJ HIRJI;NOWAK ROMUALD;GRIMES MICHAEL T.
分类号 H01L23/00;H01L21/02 主分类号 H01L23/00
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