| 摘要 |
PROBLEM TO BE SOLVED: To improve sensor accuracy under a high-temperature environment in a pressure sensor of a type for welding a diaphragm to the entire periphery of a case.SOLUTION: A diaphragm 16 includes a second corrugate 24 having a bent sectional shape formed on an inner peripheral side of a welding part 18 with a housing 11 and on an outer peripheral side opposite a measuring medium chamber 14. The housing 11 includes a corrugate housing groove 25 for housing the second corrugate 24. A contraction amount difference caused by welding heat when a temperature drops after welding of the diaphragm 16 and the housing 11 is mainly absorbed by deformation of the second corrugate 24. Thus, in the decreased temperature state after the welding, a region where a first corrugate 23 disposed in a part opposite the measuring medium chamber 14 in the diaphragm 16 is easily deformable is widened. |
