| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of rapidly performing three-dimensional observation inside an inspection object.SOLUTION: A pair of deflection electrodes 29a, 29b deflects an electron beam passing between a filament 21 and a target 27. A deflection voltage control unit 39 controls the pair of deflection electrodes 29a, 29b to thereby alternately form X-ray focal points 5a, 5b at two different positions. Thus, X-ray focal points 5a, 5b are alternately formed at two different positions rapidly with a comparatively simple configuration. An X-ray is alternately radiated to an inspection object W from the X-ray focal points 5a, 5b formed at two different positions to acquire two X-ray perspective images with a parallax. Then, acquired two X-ray perspective images with a parallax are stereoscopically observed. Consequently, three-dimensional observation inside an inspection object W is rapidly performed. |
