发明名称 |
MONOCHLOROSILANE, PROCESS AND APPARATUS FOR THE PREPARATION THEREOF |
摘要 |
The invention relates to a process for preparing monochlorosilane by reaction of monosilane and dichlorosilane in the presence of a catalyst. In the process of the invention, monochlorosilane is formed by comproportionation of monosilane and dichlorosilane. The invention further relates to the use of the monochlorosilane produced and also a plant for carrying out the process. |
申请公布号 |
US2013323151(A1) |
申请公布日期 |
2013.12.05 |
申请号 |
US201213985477 |
申请日期 |
2012.01.19 |
申请人 |
MUEH EKKEHARD;RAULEDER HARTWIG;LANG JUERGEN ERWIN;SCHORK REINHOLD;EVONIK DEGUSSA GMBH |
发明人 |
MUEH EKKEHARD;RAULEDER HARTWIG;LANG JUERGEN ERWIN;SCHORK REINHOLD |
分类号 |
C01B33/107;B01J31/02 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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