发明名称 MONOCHLOROSILANE, PROCESS AND APPARATUS FOR THE PREPARATION THEREOF
摘要 The invention relates to a process for preparing monochlorosilane by reaction of monosilane and dichlorosilane in the presence of a catalyst. In the process of the invention, monochlorosilane is formed by comproportionation of monosilane and dichlorosilane. The invention further relates to the use of the monochlorosilane produced and also a plant for carrying out the process.
申请公布号 US2013323151(A1) 申请公布日期 2013.12.05
申请号 US201213985477 申请日期 2012.01.19
申请人 MUEH EKKEHARD;RAULEDER HARTWIG;LANG JUERGEN ERWIN;SCHORK REINHOLD;EVONIK DEGUSSA GMBH 发明人 MUEH EKKEHARD;RAULEDER HARTWIG;LANG JUERGEN ERWIN;SCHORK REINHOLD
分类号 C01B33/107;B01J31/02 主分类号 C01B33/107
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