| 摘要 |
A static elimination device is proposed for eliminating static electricity on the surface of a large-size glass substrate. The static elimination device includes a rotation axis and an electrostatic neutralizer. The rotation axis is installed outside a cassette in which the glass substrate is installed. The electrostatic neutralizer is permanently connected to the rotation axis. The rotation axis is driven to rotate, causing the electrostatic neutralizer centered on the rotation axis to rotate back and forth at a specific angle. The static elimination device of the present invention features simple structure, low fuel consumption and high efficiency, low cost, and high efficiency in static elimination. Owing to these features, the static elimination device of the present invention could work very well for the glass substrate of an arbitrary size. A cassette including the static elimination device is also proposed. |
