发明名称 METHOD FOR PRODUCING REFLECTION-REDUCING INTERFERENCE LAYER SYSTEM, AND REFLECTION-REDUCING INTERFERENCE LAYER SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a reflection-reducing interference layer system with improved anti-reflection properties.SOLUTION: A stack of layers is formed by applying to a surface of a substrate 1 several layers which alternately includes a high refractive index layer 6, 8 and a low refractive index layer 5, 7. A nanoporous final layer 4 is applied to the stack of layers by vapor deposition of the material of the final layer 4 at an oblique angle relative to the normal of the top layer 8 of the stack of layers such that the refractive index of the final layer 4 is lower than the refractive index of the top layer 8 of the stack of layers.
申请公布号 JP2013242541(A) 申请公布日期 2013.12.05
申请号 JP20130082138 申请日期 2013.04.10
申请人 CARL ZEISS JENA GMBH 发明人 STEPHANE BRUYNOOGHE;THOMAS KOCH;ALEXANDRE GATTO;MICHAEL HELGERT
分类号 G02B1/11;C23C14/24;G02B5/28 主分类号 G02B1/11
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