发明名称 |
METHOD FOR PRODUCING REFLECTION-REDUCING INTERFERENCE LAYER SYSTEM, AND REFLECTION-REDUCING INTERFERENCE LAYER SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a reflection-reducing interference layer system with improved anti-reflection properties.SOLUTION: A stack of layers is formed by applying to a surface of a substrate 1 several layers which alternately includes a high refractive index layer 6, 8 and a low refractive index layer 5, 7. A nanoporous final layer 4 is applied to the stack of layers by vapor deposition of the material of the final layer 4 at an oblique angle relative to the normal of the top layer 8 of the stack of layers such that the refractive index of the final layer 4 is lower than the refractive index of the top layer 8 of the stack of layers. |
申请公布号 |
JP2013242541(A) |
申请公布日期 |
2013.12.05 |
申请号 |
JP20130082138 |
申请日期 |
2013.04.10 |
申请人 |
CARL ZEISS JENA GMBH |
发明人 |
STEPHANE BRUYNOOGHE;THOMAS KOCH;ALEXANDRE GATTO;MICHAEL HELGERT |
分类号 |
G02B1/11;C23C14/24;G02B5/28 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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