| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectral sensor capable of improving filter properties.SOLUTION: A spectral sensor 1A comprises an interference filter part 20A, a light detecting substrate 30A, and a separator 15. The interference filter part 20A has a cavity layer 21 and first and second mirror layers 22, 23 facing each other via the cavity layer 21, and transmits light having a predetermined wavelength range from the first mirror layer 22 side to the second mirror layer 23 side, selectively according to an incident position. The light detecting substrate 30A has a light receiving surface 32a on which light having been transmitted through the interference filter part 20A is incident, and detects light incident on the light receiving surface 32a. The separator 15 leads to at least one of the first and second mirror layers 22, 23 from the cavity layer 21, and optically separates the interference filter part 20A when it is viewed from a predetermined direction intersecting with the light receiving surface 32a. |
