摘要 |
PROBLEM TO BE SOLVED: To provide a method which enables images with ultrafast (less than one picosecond) time resolution and atomic scale (nanometer order) spatial resolution to be generated using a transmission electron microscope.SOLUTION: A train of optical pulses output from a femtosecond laser 110 is guided along a path 134 into a chamber 130, and applied to a cathode 140. Electron pulses are emitted from the cathode because of the photoelectric effect, accelerated by an anode 142, collimated or focused by an electron lens 146, and applied to a specimen 150. Electrons transmitted through the specimen are focused by an electron lens 152 onto a detector 154. A signal detected by the detector is signal-processed by a processor, and information associated with a structure of the specimen is output. |