ELECTROSTATIC CHUCK AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck which inhibits the occurence of abnormal electric discharge, and to provide a manufacturing method of the electrostatic chuck.SOLUTION: An electrostatic chuck includes: a metal pedestal part connected with a high-frequency power source and in which a gas passage is formed; an insulation substrate which has a first hole part formed from the side of one surface disposed on the pedestal part side and communicating with the gas passage and a second hole part having an opening smaller than the first hole part and formed from the first hole part to the other surface side; and an insulative flow part which is formed by an insulation material and flows a gas supplied from the gas passage to the second hole part, having one end being inserted into the first hole part from the one surface side and the other end being disposed in the gas passage.