发明名称 |
Apparatus and Methods for the Synthesis of Graphene by Chemical Vapor Deposition |
摘要 |
An apparatus is provided for synthesizing a film on a substrate in a reactor that defines an outer reaction space. The apparatus comprises a vessel body and one or more vessel closures. The one or more vessel closures are adapted to be removably attached to the vessel body to form a reaction vessel therewith. The reaction vessel: i) comprises graphite; ii) defines an inner reaction space adapted to contain the substrate; iii) is adapted to be placed within the outer reaction space; and iv) is adapted to allow gas outside the reaction vessel to enter the inner reaction space. |
申请公布号 |
US2013323157(A1) |
申请公布日期 |
2013.12.05 |
申请号 |
US201213484310 |
申请日期 |
2012.05.31 |
申请人 |
LI XUESONG |
发明人 |
LI XUESONG |
分类号 |
C23C16/455;B82Y30/00;B82Y40/00;C01B31/00;C23C16/46 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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