发明名称 Interposer Die for Semiconductor Packaging
摘要 According to one exemplary implementation, a method includes lithographically forming a plurality of reticle images on a semiconductor wafer. The method further includes singulating the semiconductor wafer into an interposer die such that the interposer die includes at least a portion of a first reticle image and at least a portion of a second reticle image from the plurality of reticle images. The first reticle image and the second reticle image can be produced from a single reticle. The method can further include electrically connecting a first active die to a second active die through the interposer die. The method can also include electrically connecting the first active die to a package substrate through the interposer die.
申请公布号 US2013320565(A1) 申请公布日期 2013.12.05
申请号 US201213484571 申请日期 2012.05.31
申请人 GRISWOLD MARK;BROADCOM CORPORATION 发明人 GRISWOLD MARK
分类号 H01L23/488;H01L21/58 主分类号 H01L23/488
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