| 摘要 |
Disclosed is an improved laser annealing equipment. The improved laser annealing equipment comprises a laser beam (3), a housing, a laser beam outlet window (1) located at the top of the housing, a base plate (2) for bearing material to be annealed and located at the bottom of the housing, and a movable protection block (5) located between the laser beam outlet window (1) and the base plate (2), wherein the protection block (5) is provided horizontally inclined, the protection block (5) is provided with a slit (6) passing through the top and bottom surfaces thereof, and after passing vertically downwards through the laser beam outlet window (1), the laser beam (3) continues to pass through the slit (6) to then radiate onto the base plate (2). By providing a protection block (5) horizontally inclined, the improved laser annealing equipment prevents fragments affecting the laser head, reducing replacements of the laser head and lowering costs. |
