发明名称 POLISHING TABLE, POLISHING DEVICE USING THE SAME, AND STAMPING DEVICE FOR MANUFACTURING POLISHING TABLE
摘要 PROBLEM TO BE SOLVED: To provide a polishing table capable of minimizing remaining polishing marks and improving product yield, a polishing device using the polishing table, and a stamping device for manufacturing the polishing table.SOLUTION: A polishing table 1 includes dots 11 and lands 12. The dot 11 is a bottomed hole having an opening end formed on a polishing face 15. The plurality of dots are disposed at intervals P. The land 12 is a face region excluding the plurality of dots 11 on the polishing face 15. The polishing table 1 is mounted on a rotary body 22 and used for a polishing device.
申请公布号 JP2013240844(A) 申请公布日期 2013.12.05
申请号 JP20120114121 申请日期 2012.05.18
申请人 TDK CORP 发明人 ABE KIYOHIKO;OGAWA AKIO;MIZUNO TORU;YAMAGUCHI HARUHIKO
分类号 B24B37/12;B21D22/02;B24B37/16;B30B1/42 主分类号 B24B37/12
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