发明名称 |
POLISHING TABLE, POLISHING DEVICE USING THE SAME, AND STAMPING DEVICE FOR MANUFACTURING POLISHING TABLE |
摘要 |
PROBLEM TO BE SOLVED: To provide a polishing table capable of minimizing remaining polishing marks and improving product yield, a polishing device using the polishing table, and a stamping device for manufacturing the polishing table.SOLUTION: A polishing table 1 includes dots 11 and lands 12. The dot 11 is a bottomed hole having an opening end formed on a polishing face 15. The plurality of dots are disposed at intervals P. The land 12 is a face region excluding the plurality of dots 11 on the polishing face 15. The polishing table 1 is mounted on a rotary body 22 and used for a polishing device. |
申请公布号 |
JP2013240844(A) |
申请公布日期 |
2013.12.05 |
申请号 |
JP20120114121 |
申请日期 |
2012.05.18 |
申请人 |
TDK CORP |
发明人 |
ABE KIYOHIKO;OGAWA AKIO;MIZUNO TORU;YAMAGUCHI HARUHIKO |
分类号 |
B24B37/12;B21D22/02;B24B37/16;B30B1/42 |
主分类号 |
B24B37/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|