发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, INTERLAYER INSULATOR FILM FOR DISPLAY DEVICE AND FORMATION METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition capable of forming an insulator film such as an interlayer insulator film for a display element or the like, excellent in transparency, heat-resistance, hardness, etching resistance and low water absorption, having high sensitivity, and with a smaller change amount in film thickness at an unexposed portion, and to provide an interlayer insulator film for a display element formed from the radiation-sensitive resin composition, and a manufacturing method thereof.SOLUTION: The radiation-sensitive resin composition includes: [A] a polymer component including, in an identical or different polymer, a structural unit (I) derived from a cyclic olefin monomer having an acid-dissociative group, and a structural unit (II) different from the structural unit (I) and having a polymerizable group; and [B] a radiation-sensitive acid generating body including a radiation sensitive acid generator. The structural unit (I) of the polymer component [A] may include a structural unit expressed by a formula (1) below.
申请公布号 JP2013242540(A) 申请公布日期 2013.12.05
申请号 JP20130081631 申请日期 2013.04.09
申请人 JSR CORP 发明人 ICHINOHE DAIGO;YASHIRO TAKAO;TAZAKI TAICHI;MATSUMURA SHINJI
分类号 G03F7/039;C08F232/00;G02F1/1333;G03F7/004;H01L21/027 主分类号 G03F7/039
代理机构 代理人
主权项
地址