| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device which holds a plate member inhibiting the plate member from moving in a direction perpendicular to a surface direction thereof while holding the plate member with an elastic member.SOLUTION: A holding device includes: a table including a holding surface 15 holding a plate member such as a semiconductor wafer WF etc.; contact means 20, each of which is provided in the holding surface 15 and includes a contact surface 18 providing suction force while being deformed so as to follow a surface shape of a held surface 11A of the wafer WF; and suction force providing means 24 providing the suction force to the contact surfaces 18. Each contact means 20 is provided so that the contact surface 18 is positioned on substantially the same surface as the holding surface 15 of the table and attracts the wafer WF to the holding surface 15 and holds the wafer WF when the suction force is provided to the contact surface 18. |
