| 发明名称 |
INTEGRATED RESONATOR WITH A MASS BIAS |
| 摘要 |
An integrated resonator apparatus includes a piezoelectric resonator and an acoustic Bragg reflector formed adjacent the piezoelectric resonator. The integrated resonator apparatus also includes a mass bias formed over the Bragg reflector on a side of the piezoelectric resonator opposite the piezoelectric resonator. |
| 申请公布号 |
US2013320808(A1) |
申请公布日期 |
2013.12.05 |
| 申请号 |
US201213484931 |
申请日期 |
2012.05.31 |
| 申请人 |
BURGESS BYRON NEVILLE;KRENIK WILLIAM ROBERT;JACOBSEN STUART M.;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BURGESS BYRON NEVILLE;KRENIK WILLIAM ROBERT;JACOBSEN STUART M. |
| 分类号 |
H01L41/053;H01L41/22 |
主分类号 |
H01L41/053 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
