Inspection system, management server, inspection apparatus and method for managing inspection data

摘要

An inspection system is provided that can efficiently perform the management of data obtained from a plurality of apparatuses. An inspection system (10) includes inspection apparatuses (11 a), (11 b) and (11c) to inspect products that are produced in a factory, and a management server (30) that is connected via a communication line to the inspection apparatuses (11a), (11 b) and (11c). The inspection apparatus (11a) includes an apparatus-side inspection result DB (database) (14a). The apparatus-side inspection result DB (14a) stores the inspection result data, which is data representing the result of inspecting a substrate with the inspection apparatus (11 a). The apparatus-side inspection result DB (14a) is a key-value database that is constituted by keys and values.