| 摘要 |
The present invention relates to a wafer transfer robot test simulation system for a cluster tool which performs a treatment process on a wafer in semiconductor manufacturing equipment. During the regular repair and maintenance work of the wafer transfer robot, the wafer transfer robot is detached from the cluster tool, dissembled to replace components, cleaned, reassembled, and then installed at a jig. Using a simulation controller tool where a motion board and a simulation program are mounted, a moving test of the robot can be performed to enable the execution of a reliable process. |
