| 摘要 |
A method for determining a distance (Y) between a first position on and an electrical boundary (34) of a test sample by a multi-point probe comprising four contact elements, comprising: contacting the test sample with the four contact elements (20,22,24,26) at the first position, applying a magnetic field at the first position, performing a first and a second four-point measurement and deriving a first and a second resistance value, calculating a first resistance difference from the first and second resistance values, performing a third and a fourth four-point measurement and deriving a third and a fourth resistance value, calculating a second resistance difference from the third and fourth resistance values, defining a first relation including parameters representing the first resistance difference, the second resistance difference, and the distance between the first position and the electrical boundary, determining the distance by using the first and the second resistance differences in the first relation. |
