发明名称 AIR KNIFE WITH DEVICE FOR ADJUSTING SPRAY ANGLE OF THE AIR KNIFE AUTOMATICALLY
摘要 The purpose of the present invention is to provide an air knife with device for automatically adjusting spraying angles to promptly and accurately adjust spraying angles for an air knife and improve drying performance for a base plate by automatically arranging the spraying angles into predetermined optimal angles based on the thickness of the base plate injected. For this, the present invention comprises first and second air knives (110, 120) spaced apart from each other in the vertical direction for injecting dry air to the top and bottom of a base plate transferred through a space between them; and first and second spraying angle adjusting devices (150, 170). The first and second spraying angle adjusting devices (150, 170) are made of a permanent magnet (152) and an electromagnet (153) arranged on the circumference of the permanent magnet which is joined to the circumference of the rotary shaft (111) of the first and second air knives (110, 120). The first and second spraying angle adjusting devices (150, 170) adjust the rotation frequency of the rotary shaft (111) to adjust the spraying angles for the first and second air knives (110, 120) into predetermined spraying angles based on the thickness of the base plate transferred by adjusting the strength and direction of a current applied to the electromagnet (153).
申请公布号 KR101336866(B1) 申请公布日期 2013.12.04
申请号 KR20120063279 申请日期 2012.06.13
申请人 K.C.TECH CO., LTD. 发明人 BAIK, WOON YOUNG
分类号 H01L21/302 主分类号 H01L21/302
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