APPARATUS FOR MANUFACTURING GRAPHENE AND METHOD OF MANUFACTURING GRAPHENE USING THE SAME

摘要

A graphene production apparatus includes a chamber providing a space for processing a substrate. A substrate supporter is located in the chamber for supporting the substrate. A gas supplying unit supplies carbon source gas into the chamber. A lamp unit is installed inside the chamber to be relatively moved against the substrate, and includes a focus unit for focusing a light source and light from the light source to a local position on the substrate for locally heating.