| 摘要 |
A device for drying a substrate comprises a drying chamber, an iso-propyl alcohol (IPA) supply unit, and an IPA moving unit. The drying chamber comprises a spin chuck which a substrate is loaded to be rotated. The drying chamber comprises a spray unit which sprays IPA alcohol to the substrate on the upper part of the spin chuck. The IPA supply unit comprises an IPA tank and a main heater. The IPA tank supplies IPA to the drying chamber. The main heater heats the IPA at a predetermined temperature. The IPA moving unit forms a path which moves the IPA from the IPA tank to the drying chamber. The IPA moving unit comprises a reheating heater which is installed in the IPA moving unit to be positioned in a side unit of the spray unit and reheats the IPA which is moved according to the IPA moving unit. The present invention is provided to reheat the IPA in the reheating heater, which is installed to be adjacent to the spray unit, after heating the IPA at the predetermined temperature in the main heater, thereby supplying the IPA to the substrate arranged in the drying chamber. |
