NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS
摘要
<p>The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.</p>
申请公布号
EP2454573(B1)
申请公布日期
2013.12.04
申请号
EP20100731526
申请日期
2010.07.13
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
ANDREUCCI, PHILIPPE;DURAFFOURG, LAURENT;MARCOUX, CARINE;BRIANCEAU, PIERRE;HENTZ, SEBASTIEN;MINORET, STEPHANE;MYERS, EDWARD;ROUKES, MICHAEL