NOZZLE UNIT AND EQUIPMENT FOR DEPOSITION UNIT

摘要

This invention relates to substrate processing equipment. The substrate processing equipment of the present invention includes a processing tube accommodating a boat with multiple substrates; a heater assembly installed to surround the processing tube; and a nozzle unit supplying processing gases for forming a thin film on the surface of the substrate while the nozzle unit includes a heat reflecting material which blocks and reflects the heat energy provided by the heater assembly. [Reference numerals] (AA) Cooling gas