发明名称
摘要 A semiconductor device has a heterostructure including a first layer (14) of semiconductor oxide material. A second layer (16) of semiconductor oxide material is formed on the first layer (14) of semiconductor oxide material such that a two dimensional electron gas builds up at an interface between the first and second materials. A passivation layer (18) on the outer surface stabilizes the structure. The device also has a source contact (20) and a drain contact (22).
申请公布号 JP5356645(B2) 申请公布日期 2013.12.04
申请号 JP20060339628 申请日期 2006.12.18
申请人 发明人
分类号 H01L21/338;H01L29/221;H01L29/778;H01L29/812 主分类号 H01L21/338
代理机构 代理人
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