发明名称 Sea-of-fins structure on a semiconductor substrate and method of fabrication
摘要 A semiconductor device and a method of fabricating a semiconductor device, wherein the method includes forming, on a substrate, a plurality of planarized fin bodies to be used for customized fin field effect transistor (FinFET) device formation; forming a nitride spacer around each of the plurality of fin bodies; forming an isolation region in between each of the fin bodies; and coating the plurality of fin bodies, the nitride spacers, and the isolation regions with a protective film. The fabricated semiconductor device is adapted to be used in customized applications as a customized semiconductor device.
申请公布号 US8598641(B2) 申请公布日期 2013.12.03
申请号 US201113287170 申请日期 2011.11.02
申请人 CHEN HOWARD H.;HSU LOUIS C.;MANDELMAN JACK A.;SUNG CHUN-YUNG;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHEN HOWARD H.;HSU LOUIS C.;MANDELMAN JACK A.;SUNG CHUN-YUNG
分类号 H01L27/108;H01L29/94 主分类号 H01L27/108
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