The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
申请公布号
US8599463(B2)
申请公布日期
2013.12.03
申请号
US201213449906
申请日期
2012.04.18
申请人
WU JOYCE H.;ANDERSSON MARK B.;STEYN JASPER LODEWYK;PIXTRONIX, INC.
发明人
WU JOYCE H.;ANDERSSON MARK B.;STEYN JASPER LODEWYK
