COOLING UNIT, PROCESSING CHAMBER, PART IN THE PROCESSING CHAMBER, AND COOLING METHOD

摘要

A cooling unit for cooling a target object to a target temperature includes a decompression chamber thermally connected to the target object; a spraying part which sprays a liquid heat medium having a temperature equal to or lower than the target temperature to an inner surface of the decompression chamber; and an electric field generator which generates an electric field such that the heat medium sprayed from the spraying part is attached to the inner surface of the decompression chamber. The cooling unit further includes an exhaust part which evacuates the decompression chamber such that a pressure in the decompression chamber is equal to or lower than a saturated vapor pressure of the heat medium at the target temperature.