| 摘要 |
A laser crystallization apparatus is provided to improve the number of effective laser pulses irradiated to the same position of a substrate by including a stage with a tilt angle. A laser irradiating apparatus(100) irradiates a laser. A stage(130) is inclined by a tilt angle, corresponding to the laser irradiating apparatus. A plurality of pins(140) are mounted on the stage, vertically transferring. The laser irradiating apparatus can include a laser generating part for generating a laser beam, a reflection mirror(121,122,123) for varying the progression direction of the laser beam emitted through the laser generating part, and a single homogenizer(124) for making uniform the energy density of the laser beam whose progression direction is varied by the reflection mirror. |
