发明名称 |
TARC material for immersion watermark reduction |
摘要 |
A coating material for use during a lithography process. In an example, a coating material disposed on a material layer includes a polymer and a quencher catcher chemically bonded to the polymer. The quencher catcher substantially neutralizes any quencher that diffuses into the coating material from the material layer. |
申请公布号 |
US8597870(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US201213525796 |
申请日期 |
2012.06.18 |
申请人 |
CHANG CHING-YU;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHANG CHING-YU |
分类号 |
G03F7/00;G03F7/11 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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