发明名称 |
WET-ETCHING EQUIPMENT AND ITS SUPPLYING DEVICE |
摘要 |
<p>Provided is a supply device including a supply unit and a control unit. The supply unit includes a run-through supply path for delivering fluids. The control unit comprises a channel and one or more return paths which are adjacent to the channel. The supply unit is positioned inside the channel so that the fluids flow to the channel therethrough. The supply unit is positioned inside the channel for absorbing a part of etching solutions outputted from the channel to allow the return paths to control the output amount of the fluids. Also, web-etching equipment including the supply device is provided.</p> |
申请公布号 |
KR20130131205(A) |
申请公布日期 |
2013.12.03 |
申请号 |
KR20120116061 |
申请日期 |
2012.10.18 |
申请人 |
UNIMICRON TECHNOLOGY CORP. |
发明人 |
TSENG TZYY JANG;CHEN TSUNG YUAN |
分类号 |
H01L21/306;H01L21/02 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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