发明名称 Friction force microscope
摘要 Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.
申请公布号 US8601609(B2) 申请公布日期 2013.12.03
申请号 US201213409249 申请日期 2012.03.01
申请人 YASUTAKE MASATOSHI;WATANABE MASAFUMI;SII NANOTECHNOLOGY INC. 发明人 YASUTAKE MASATOSHI;WATANABE MASAFUMI
分类号 G01Q60/24;G01Q60/22 主分类号 G01Q60/24
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