发明名称 |
Friction force microscope |
摘要 |
Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force. |
申请公布号 |
US8601609(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US201213409249 |
申请日期 |
2012.03.01 |
申请人 |
YASUTAKE MASATOSHI;WATANABE MASAFUMI;SII NANOTECHNOLOGY INC. |
发明人 |
YASUTAKE MASATOSHI;WATANABE MASAFUMI |
分类号 |
G01Q60/24;G01Q60/22 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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