发明名称 |
Infrared detector based on suspended bolometric micro-plates |
摘要 |
A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate. |
申请公布号 |
US8598528(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US201113238410 |
申请日期 |
2011.09.21 |
申请人 |
BOUTAMI SALIM;ARNAUD AGNES;DUMONT GEOFFROY;IMPERINETTI PIERRE;MARY ALEXANDRE;POCAS STEPHANE;RABAUD WILFRIED;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
BOUTAMI SALIM;ARNAUD AGNES;DUMONT GEOFFROY;IMPERINETTI PIERRE;MARY ALEXANDRE;POCAS STEPHANE;RABAUD WILFRIED |
分类号 |
G01J5/02 |
主分类号 |
G01J5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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