| 摘要 |
Disclosed is a showerhead for uniformly injecting a gas onto the entire surface of a substrate and preventing the deflection of the showerhead and a method for manufacturing the same. According to the present invention, the showerhead includes at least one gas chamber, a main body injecting the gas to one surface and supplying the gas to the gas chamber, a deflection prevention pin preventing the deflection of the main body and installed in the gas chamber, and a flow path opened on one surface of the main body, connected to the gas chamber, and penetrating the deflection prevention pin. |
