A FLEXIBLE MEMBRANE FOR POLISHING HEAD

摘要

A flexible membrane for a polishing head comprises a disc-shaped main unit which includes a first face being in contact with one surface of a substrate and a second face being opposite to the first face; expansion units which limit each independent space by protruding vertically from the second face of the main unit; and an inner ring which is mounted inside the outermost expansion units among the expansion units in order to support the edge part, and has flat upper and lower faces in a combined state. When performing a polishing process using the membrane, the surface flatness of a substrate increases.