| 摘要 |
An apparatus for forming a nano-pattern and a method using the same are provided to obtain a fine-pattern with low equipment investment and to separate compressed stamp safely by using pressure difference among divided spaces, ultimately to raise the productivity. The first chamber(110) forms the first space with a stamp having nano-pattern in accordance with installing the stamp. The second chamber(120) forms the second space with a stamp installed in the first chamber in accordance with combining with the first chamber, and forms a third space with the substrate coated with photoresist in accordance with settling the substrate. A pressure control part(400) controls the pressures of the first, the second and the third spaces. An apparatus for forming nano-pattern leads the pressures of the first and the third spaces to act to the second space, pressurize the stamp and the substrate, and imprint the nano-pattern on the substrate. The first chamber and the substrate are spaced with uniform gap. A stamp fixing unit stretches between the first chamber and the substrate. |
