| 摘要 |
PURPOSE: A device and a method for controlling the initial position of a superfine a gap sensor are provided to offset the backlash of a fixing bolt and tilt error due to processing error and assembly error by adhering the probe lower surface of the gap sensor and an upper frame to have a tilt gap of predetermined size. CONSTITUTION: A device for controlling the initial position of a superfine a gap sensor comprises a frame unit(110), a sarrus link unit(130), and a driving bolt(150). The sarrus link unit mutually connects an upper frame(111) and a lower frame(113) to be possible for sarrus mechanism. The driving bolt is coupled with the lower surface of the upper frame by penetrating the lower frame and drives the sarrus link unit. |
