SUBSTRATE GRIDING APPATUS AND METHOD THEREOF

摘要

An apparatus and a method for grinding a substrate are disclosed. The apparatus for grinding a substrate comprises a stage unit, a grinding unit, a camera unit, and a replacement unit. The grinding unit has a grinding wheel and grinds the edge of a substrate. The camera unit photographs the grinding wheel and analyzes the photographed images in order to generate information on the grinding wheel. The replacement unit has a preparatory grinding wheel, and supplies or collects the preparatory grinding wheel to or from the grinding unit. The apparatus for grinding a substrate compensates for the position of the grinding wheel or replaces the grinding wheel based on the information on the grinding wheel.