| 摘要 |
PURPOSE: A particle leakage preventing device of a transfer robot is provided to prevent particles from being leaked outside the transfer robot by making the particles from a second driving unit remain in a linear transfer member. CONSTITUTION: A first cable part(K1) passes through a vertical shaft and a base member from a body. A second cable part(K2) is extended from the first cable part and is located on the upper side of the base member. A third cable part is extended from the second cable part and is located in a linear transfer member. A fourth cable part is extended from the third cable part and is located in an object transfer member. A cover unit surrounds the sides of components located on the upper side of the base member. A cover plate(640) covers the upper sides of the components on the upper side of the base member. |
