| 摘要 |
OF THE DISCLOSUREAN INSULATED DIELECTRIC WINDOW ASSEMBLY OF AN INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUSAn insulated dielectric window assembly comprising a dielectric window of an inductively coupled plasma processing apparatus, an upper polymeric ring, and a lower polymeric ring. The upper polymeric ring insulates the outer edge of the dielectric window from a cooler ambient atmosphere and the lower polymeric ring insulates the lower surface of the dielectric window from a chamber surface supporting the window.FIG. 1 |
