| 摘要 |
PURPOSE: A non-contact type cleaning device is provide to collect cleaning liquid without leakage to outside, thereby being capable of preventing polluted cleaning liquid from being scattered to outside and preventing a secondary pollution near a slit nozzle. CONSTITUTION: A non-contact type cleaning device comprises a cleaning body, a cleaning liquid outlet (130), and a cleaning liquid inlet(140). The cleaning body comprises an opposite side corresponding to the both nozzle sides of the outlet. The cleaning body separated from the slit nozzle and moves along the outlet. The cleaning liquid outlet sprays the cleaning liquid towards the slit. The cleaning liquid outlet is formed on the corresponding side. The cleaning liquid inlet applies a negative pressure to the corresponding so as to collect polluted cleaning liquid. The cleaning inlet is formed on the corresponding side. [Reference numerals] (132) Cleaning liquid supplying unit; (142) Cleaning liquid sucking unit; (152) Compressed gas supplying unit |
