| 摘要 |
Provided is a film forming apparatus including multiple plasma guns and making the thickness of a film uniform. In the film forming apparatus (1) including the plasma guns, a potential gradient generating part (7) generating a potential gradient is installed between a hearth part (20) and a to-be-treated object placing part. The potential gradient generating part restrains the behaviors of ionized film forming material particles by generating the potential gradient, and then controls the thickness of film forming material adhering to a to-be-treated object by varying the energy and flow velocity distribution of the ionized film forming material particles. |
