| 摘要 |
Flexible Carrier Mount, Device and Method for Detaching a Carrier Substrate AbstractThis invention relates to a flexible carrier mount (1) for mounting of a carrier substrate (13) when the carrier substrate (13) is detached from a product substrate (11), detachment means (1. 28) being provided for debonding of the product substrate (II) with bending of the cander substrate (13).Furthermore this invention relates to a device for detaching a carrier substrate (13) from one product substrate (11) in one detachment direction (L) with the following features:- a carrier mount (1) which is flexible in the detachment direction (L) for mounting of he carrier substrate (13),- a substrate mount (18) for mounting of the product substrate (II) and- detachment means (I. 15, 15', 16, 28) for debonding of the carrier substrate (13) from the product substrate (I) with bending of the carrier substrate (11).Moreover this invention relates to a method for detaching a carrier substrate from a product substrate in one detachment direction (L) with following steps, especially the following sequence:- mounting of the product substrate with a substrate mount and mounting of the carrier substrate with a carrier mount which is flexible in the detachment direction (L) and- debonding of the carrier substrate from the product substrate with bending of the product substrate.Figure 9c |
