| 摘要 |
PURPOSE: A pattern forming method with microwaves is provided to form fine patterns on not only metal-organic matters also all organic films as the micro waves and an organic precursor solution optimized for the microwaves are used. CONSTITUTION: A pattern forming method with microwaves comprises following steps. A substrate(10) is coated with an organic precursor solution, and a coating layer is formed. The coating layer is pressed by a mold with a first pattern, and a second pattern is formed. The mold is removed from the coating layer. The microwaves are irradiated on the coating layer with the second pattern(31). |
