| 摘要 |
An ultrasonic transducer comprises a substrate having an opening, a supporting film on the substrate to cover the opening, and a piezoelectric element provided at an opening-overlapping part of the supporting film, where overlaps with the opening in a planar view in a thickness direction of the substrate. The thickness of the opening-overlapping part at a center of gravity is smaller than a thickness of an outer edge portion of the part being closer to the substrate than the center to the substrate. In addition, the opening-overlapping part includes a portion of which the thickness gradually increases from the center of gravity toward the outer edge portion. |
