发明名称 METHOD FOR MANUFACTURING ULTRASONIC THICKNESS SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin and flexible ultrasonic thickness measurement sensor which can follow up even a curved surface to be measured, can eliminate various works before and after thickness measurement, while reducing the effort and time required for the thickness measurement, by always pasting a sheet to a part to be measured, can measure the thickness of a large number of parts simultaneously or measure the thickness continuously, and can be used even at a relatively high temperature of 300°C or higher.SOLUTION: The method for manufacturing an ultrasonic thickness sensor comprises: a process including the steps of mixing bismuth titanate powder with low-melting point glass powder of bismuth-based glass or the like, applying paste of the mixture to a surface of a thin-plate-like support member to make one of electrodes with at least its surface having conductivity, and heating and sintering the support member, thereby forming a relatively-porous and flexible thin bismuth titanate sintered compact layer over the surface of the thin-plate-like support member; and a subsequent process including the steps of attaching the other electrode, and performing a polarization process, thereby arranging the sensor to have flexibility generally.
申请公布号 JP2013239636(A) 申请公布日期 2013.11.28
申请号 JP20120112547 申请日期 2012.05.16
申请人 MITSUBISHI HEAVY IND LTD 发明人 MORI KAZUTAKA;NANBA KATSUMI;NAGANO ICHIRO;UEMOTO AKIHIRO
分类号 H01L41/22;C04B35/462;G01B17/02;H01L41/08;H01L41/187;H01L41/257;H01L41/39 主分类号 H01L41/22
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